JPH0626804Y2 - シールド付微動機構 - Google Patents

シールド付微動機構

Info

Publication number
JPH0626804Y2
JPH0626804Y2 JP1989021002U JP2100289U JPH0626804Y2 JP H0626804 Y2 JPH0626804 Y2 JP H0626804Y2 JP 1989021002 U JP1989021002 U JP 1989021002U JP 2100289 U JP2100289 U JP 2100289U JP H0626804 Y2 JPH0626804 Y2 JP H0626804Y2
Authority
JP
Japan
Prior art keywords
detection probe
piezoelectric element
hollow cylindrical
element body
fine movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989021002U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02113104U (en]
Inventor
寛 阪東
亘 水谷
重夫 岡山
眞二 渡辺
茂 脇山
千加良 宮田
Original Assignee
工業技術院長
株式会社小坂研究所
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, 株式会社小坂研究所, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1989021002U priority Critical patent/JPH0626804Y2/ja
Publication of JPH02113104U publication Critical patent/JPH02113104U/ja
Application granted granted Critical
Publication of JPH0626804Y2 publication Critical patent/JPH0626804Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1989021002U 1989-02-23 1989-02-23 シールド付微動機構 Expired - Lifetime JPH0626804Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989021002U JPH0626804Y2 (ja) 1989-02-23 1989-02-23 シールド付微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989021002U JPH0626804Y2 (ja) 1989-02-23 1989-02-23 シールド付微動機構

Publications (2)

Publication Number Publication Date
JPH02113104U JPH02113104U (en]) 1990-09-11
JPH0626804Y2 true JPH0626804Y2 (ja) 1994-07-20

Family

ID=31237849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989021002U Expired - Lifetime JPH0626804Y2 (ja) 1989-02-23 1989-02-23 シールド付微動機構

Country Status (1)

Country Link
JP (1) JPH0626804Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構
JP5780910B2 (ja) * 2011-10-03 2015-09-16 オリンパス株式会社 円筒型圧電素子の製造方法
DE102015004181A1 (de) * 2015-04-02 2016-10-06 Dieter Mankau Aktuator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64401A (en) * 1987-05-29 1989-01-05 Agency Of Ind Science & Technol Mechanism for attaching and detaching fine adjustment element for stm

Also Published As

Publication number Publication date
JPH02113104U (en]) 1990-09-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term